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CIRCLE WITH A DOT

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  3. semiconductor folks!

semiconductor folks!

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  • whitequark@social.treehouse.systemsW whitequark@social.treehouse.systems

    neither me nor anybody i've talked to so far (including some industry people) could point at any process steps they know involves helium, and i've no idea where this claim originated

    hemera@meow.socialH This user is from outside of this forum
    hemera@meow.socialH This user is from outside of this forum
    hemera@meow.social
    wrote last edited by
    #3

    @whitequark That's a good question ye.

    Maybe some of the vapor deposition processes?

    riley@toot.catR 1 Reply Last reply
    0
    • whitequark@social.treehouse.systemsW whitequark@social.treehouse.systems

      neither me nor anybody i've talked to so far (including some industry people) could point at any process steps they know involves helium, and i've no idea where this claim originated

      krans@mastodon.me.ukK This user is from outside of this forum
      krans@mastodon.me.ukK This user is from outside of this forum
      krans@mastodon.me.uk
      wrote last edited by
      #4

      @whitequark EUV photolithography requires a pure hydrogen atmosphere — great question about helium usage!

      ben@s.djehuti.comB 1 Reply Last reply
      0
      • krans@mastodon.me.ukK krans@mastodon.me.uk

        @whitequark EUV photolithography requires a pure hydrogen atmosphere — great question about helium usage!

        ben@s.djehuti.comB This user is from outside of this forum
        ben@s.djehuti.comB This user is from outside of this forum
        ben@s.djehuti.com
        wrote last edited by
        #5

        @krans @whitequark I can at least answer the last question. https://en.wikipedia.org/wiki/National_Helium_Reserve

        whitequark@social.treehouse.systemsW 1 Reply Last reply
        0
        • whitequark@social.treehouse.systemsW whitequark@social.treehouse.systems

          neither me nor anybody i've talked to so far (including some industry people) could point at any process steps they know involves helium, and i've no idea where this claim originated

          sobex@social.sciences.reS This user is from outside of this forum
          sobex@social.sciences.reS This user is from outside of this forum
          sobex@social.sciences.re
          wrote last edited by
          #6

          @whitequark On bsky, the first thing in my TL seems to be there https://fosstodon.org/@AkaSci/116273165320321185

          1 Reply Last reply
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          • ben@s.djehuti.comB ben@s.djehuti.com

            @krans @whitequark I can at least answer the last question. https://en.wikipedia.org/wiki/National_Helium_Reserve

            whitequark@social.treehouse.systemsW This user is from outside of this forum
            whitequark@social.treehouse.systemsW This user is from outside of this forum
            whitequark@social.treehouse.systems
            wrote last edited by
            #7

            @ben @krans I did read the Wikipedia page, obviously. I'm asking the question because I'm interested in non-public information industry insiders are usually aware of

            ben@s.djehuti.comB 1 Reply Last reply
            0
            • whitequark@social.treehouse.systemsW whitequark@social.treehouse.systems

              semiconductor folks! I've seen a lot of talking heads repeat the claim that "a helium shortage is bad for chip production", never substantiated with useful information. do any of you know:

              • what is helium actually used in the processes?
              • which specific processes would be affected?
              • how much helium (ballpark) is needed per year?
              • where, if anywhere, a closed cycle is used?
              • what happened to the strategic helium reserve in the US?
              lixou@hachyderm.ioL This user is from outside of this forum
              lixou@hachyderm.ioL This user is from outside of this forum
              lixou@hachyderm.io
              wrote last edited by
              #8

              @whitequark the only thing where I heard chip and helium in one sentence was an announcement from a norwegian company who want to replace EUV with helium atoms for smaller prints. But that surely isn't meant lol

              1 Reply Last reply
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              • whitequark@social.treehouse.systemsW whitequark@social.treehouse.systems

                @ben @krans I did read the Wikipedia page, obviously. I'm asking the question because I'm interested in non-public information industry insiders are usually aware of

                ben@s.djehuti.comB This user is from outside of this forum
                ben@s.djehuti.comB This user is from outside of this forum
                ben@s.djehuti.com
                wrote last edited by
                #9

                @whitequark @krans I was sure the answer was going to be that it got used for an epic white house slumber party

                1 Reply Last reply
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                • whitequark@social.treehouse.systemsW whitequark@social.treehouse.systems

                  neither me nor anybody i've talked to so far (including some industry people) could point at any process steps they know involves helium, and i've no idea where this claim originated

                  gsuberland@chaos.socialG This user is from outside of this forum
                  gsuberland@chaos.socialG This user is from outside of this forum
                  gsuberland@chaos.social
                  wrote last edited by
                  #10

                  @whitequark I have never heard a good explanation either.

                  whitequark@social.treehouse.systemsW 1 Reply Last reply
                  0
                  • whitequark@social.treehouse.systemsW whitequark@social.treehouse.systems

                    semiconductor folks! I've seen a lot of talking heads repeat the claim that "a helium shortage is bad for chip production", never substantiated with useful information. do any of you know:

                    • what is helium actually used in the processes?
                    • which specific processes would be affected?
                    • how much helium (ballpark) is needed per year?
                    • where, if anywhere, a closed cycle is used?
                    • what happened to the strategic helium reserve in the US?
                    dalias@hachyderm.ioD This user is from outside of this forum
                    dalias@hachyderm.ioD This user is from outside of this forum
                    dalias@hachyderm.io
                    wrote last edited by
                    #11

                    @whitequark The US strategic reserve was sold dirt cheap to capitalist parasites.

                    whitequark@social.treehouse.systemsW 1 Reply Last reply
                    0
                    • gsuberland@chaos.socialG gsuberland@chaos.social

                      @whitequark I have never heard a good explanation either.

                      whitequark@social.treehouse.systemsW This user is from outside of this forum
                      whitequark@social.treehouse.systemsW This user is from outside of this forum
                      whitequark@social.treehouse.systems
                      wrote last edited by
                      #12

                      @gsuberland apparently the primary use, or at least one of the primary uses, is wafer and lens cooling during high temperature processing (so it's used as a heat transfer fluid and mostly recovered); there may also be uses of it as carrier gas or purge gas; I haven't got any numbers still

                      1 Reply Last reply
                      0
                      • dalias@hachyderm.ioD dalias@hachyderm.io

                        @whitequark The US strategic reserve was sold dirt cheap to capitalist parasites.

                        whitequark@social.treehouse.systemsW This user is from outside of this forum
                        whitequark@social.treehouse.systemsW This user is from outside of this forum
                        whitequark@social.treehouse.systems
                        wrote last edited by
                        #13

                        @dalias I know that, but not what said parasites do with it now, which is the part that interests me

                        1 Reply Last reply
                        0
                        • whitequark@social.treehouse.systemsW whitequark@social.treehouse.systems

                          semiconductor folks! I've seen a lot of talking heads repeat the claim that "a helium shortage is bad for chip production", never substantiated with useful information. do any of you know:

                          • what is helium actually used in the processes?
                          • which specific processes would be affected?
                          • how much helium (ballpark) is needed per year?
                          • where, if anywhere, a closed cycle is used?
                          • what happened to the strategic helium reserve in the US?
                          be_far@social.treehouse.systemsB This user is from outside of this forum
                          be_far@social.treehouse.systemsB This user is from outside of this forum
                          be_far@social.treehouse.systems
                          wrote last edited by
                          #14

                          @whitequark helium is non-reactive, so it’s used as a carrier gas and a chamber control gas (fill the chamber with it and flow your chemical vapor deposition gases into that environment). Different gases have different effects on the temperature control of the chamber for different materials’ growth processes. As a carrier gas I believe helium has the most use in Si-doping.

                          A few paragraphs on helium’s thermal properties in https://semiengineering.com/using-less-helium-in-semiconductor-manufacturing/

                          whitequark@social.treehouse.systemsW 1 Reply Last reply
                          0
                          • be_far@social.treehouse.systemsB be_far@social.treehouse.systems

                            @whitequark helium is non-reactive, so it’s used as a carrier gas and a chamber control gas (fill the chamber with it and flow your chemical vapor deposition gases into that environment). Different gases have different effects on the temperature control of the chamber for different materials’ growth processes. As a carrier gas I believe helium has the most use in Si-doping.

                            A few paragraphs on helium’s thermal properties in https://semiengineering.com/using-less-helium-in-semiconductor-manufacturing/

                            whitequark@social.treehouse.systemsW This user is from outside of this forum
                            whitequark@social.treehouse.systemsW This user is from outside of this forum
                            whitequark@social.treehouse.systems
                            wrote last edited by
                            #15

                            @be_far thanks. I have some background in vacuum systems so this makes a lot of sense. do you know the ballpark number for how much helium is used, after accounting for reclamation?

                            be_far@social.treehouse.systemsB 1 Reply Last reply
                            0
                            • whitequark@social.treehouse.systemsW whitequark@social.treehouse.systems

                              semiconductor folks! I've seen a lot of talking heads repeat the claim that "a helium shortage is bad for chip production", never substantiated with useful information. do any of you know:

                              • what is helium actually used in the processes?
                              • which specific processes would be affected?
                              • how much helium (ballpark) is needed per year?
                              • where, if anywhere, a closed cycle is used?
                              • what happened to the strategic helium reserve in the US?
                              riley@toot.catR This user is from outside of this forum
                              riley@toot.catR This user is from outside of this forum
                              riley@toot.cat
                              wrote last edited by
                              #16

                              @whitequark FWIW, my hunch is, if chipmaking is affected by helium deficit, the troubles would be more likely to hit R&D and possibly the construction of new foundries than ongoing manufacturing processes. Cryocrystallography is a thing in materials science research, and while it used to largely get by with liquid nitrogen, the bleeding^W chattering edge of new research has been shifting steadily coldwards.

                              whitequark@social.treehouse.systemsW 1 Reply Last reply
                              0
                              • whitequark@social.treehouse.systemsW whitequark@social.treehouse.systems

                                neither me nor anybody i've talked to so far (including some industry people) could point at any process steps they know involves helium, and i've no idea where this claim originated

                                whitequark@social.treehouse.systemsW This user is from outside of this forum
                                whitequark@social.treehouse.systemsW This user is from outside of this forum
                                whitequark@social.treehouse.systems
                                wrote last edited by
                                #17

                                from some discussion and research, it seems like one of the major uses is in ESC/BSG wafer clamp devices (https://csmantech.org/wp-content/acfrcwduploads/field_5e8cddf5ddd10/post_6573/15.3_Characterization_of_Electrostatic_Chuck.pdf) where flow of helium is less than 20 sccm per chuck.

                                this represents about 2 micrograms of helium per second per chuck, which i'm not too concerned about. there are of course some other applications that may consume more helium

                                1 Reply Last reply
                                0
                                • riley@toot.catR riley@toot.cat

                                  @whitequark FWIW, my hunch is, if chipmaking is affected by helium deficit, the troubles would be more likely to hit R&D and possibly the construction of new foundries than ongoing manufacturing processes. Cryocrystallography is a thing in materials science research, and while it used to largely get by with liquid nitrogen, the bleeding^W chattering edge of new research has been shifting steadily coldwards.

                                  whitequark@social.treehouse.systemsW This user is from outside of this forum
                                  whitequark@social.treehouse.systemsW This user is from outside of this forum
                                  whitequark@social.treehouse.systems
                                  wrote last edited by
                                  #18

                                  @riley yea that's reasonable

                                  1 Reply Last reply
                                  0
                                  • hemera@meow.socialH hemera@meow.social

                                    @whitequark That's a good question ye.

                                    Maybe some of the vapor deposition processes?

                                    riley@toot.catR This user is from outside of this forum
                                    riley@toot.catR This user is from outside of this forum
                                    riley@toot.cat
                                    wrote last edited by
                                    #19

                                    @Hemera As far as I know, all currently used cold vapour deposition techniques of relevance to (mainstream) chip-making can be done at liquid nitrogen temperature or higher. Quantum computer research might have uses for colder ones. It's not impossible that NSA could be using helium-requiring chips in large numbers, and their supplier(s) would have trouble without helium, but I don't know of solid leaks positively affirming such, so far.

                                    @whitequark

                                    whitequark@social.treehouse.systemsW 1 Reply Last reply
                                    0
                                    • riley@toot.catR riley@toot.cat

                                      @Hemera As far as I know, all currently used cold vapour deposition techniques of relevance to (mainstream) chip-making can be done at liquid nitrogen temperature or higher. Quantum computer research might have uses for colder ones. It's not impossible that NSA could be using helium-requiring chips in large numbers, and their supplier(s) would have trouble without helium, but I don't know of solid leaks positively affirming such, so far.

                                      @whitequark

                                      whitequark@social.treehouse.systemsW This user is from outside of this forum
                                      whitequark@social.treehouse.systemsW This user is from outside of this forum
                                      whitequark@social.treehouse.systems
                                      wrote last edited by
                                      #20

                                      @riley @Hemera consider that helium is also sometimes used as carrier or purge gas (in quantities I'd very much like to know about)

                                      riley@toot.catR sobex@social.sciences.reS gwenthefops@transfem.socialG 3 Replies Last reply
                                      0
                                      • whitequark@social.treehouse.systemsW whitequark@social.treehouse.systems

                                        @be_far thanks. I have some background in vacuum systems so this makes a lot of sense. do you know the ballpark number for how much helium is used, after accounting for reclamation?

                                        be_far@social.treehouse.systemsB This user is from outside of this forum
                                        be_far@social.treehouse.systemsB This user is from outside of this forum
                                        be_far@social.treehouse.systems
                                        wrote last edited by
                                        #21

                                        @whitequark the one number I’ve ever seen (couldn’t ever find a source, everyone just repeats it) is that one advanced TSMC fab uses 500,000 cubic meters of helium a year. If it’s used as a purge gas like you mentioned in another comment I imagine it’s very low reclamation but I don’t know if that number takes reclamation into account (even if it’s not made up).

                                        whitequark@social.treehouse.systemsW 1 Reply Last reply
                                        0
                                        • whitequark@social.treehouse.systemsW whitequark@social.treehouse.systems

                                          @riley @Hemera consider that helium is also sometimes used as carrier or purge gas (in quantities I'd very much like to know about)

                                          riley@toot.catR This user is from outside of this forum
                                          riley@toot.catR This user is from outside of this forum
                                          riley@toot.cat
                                          wrote last edited by
                                          #22

                                          @whitequark Oh. Yeah. That could be a use.

                                          @Hemera

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