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  3. semiconductor folks!

semiconductor folks!

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  • whitequark@social.treehouse.systemsW whitequark@social.treehouse.systems

    semiconductor folks! I've seen a lot of talking heads repeat the claim that "a helium shortage is bad for chip production", never substantiated with useful information. do any of you know:

    • what is helium actually used in the processes?
    • which specific processes would be affected?
    • how much helium (ballpark) is needed per year?
    • where, if anywhere, a closed cycle is used?
    • what happened to the strategic helium reserve in the US?
    xeno@hexokina.seX This user is from outside of this forum
    xeno@hexokina.seX This user is from outside of this forum
    xeno@hexokina.se
    wrote last edited by
    #28

    @whitequark@social.treehouse.systems it’s used for loads of things, as a carrier gas, for cooling, and the main way to find leaks in an ultra high vacuum system (of which fabs have loads) is by spraying helium around the outside and looking for helium that makes it inside

    there’s probably plenty of other uses I’m just ignorant of

    whitequark@social.treehouse.systemsW azonenberg@ioc.exchangeA 2 Replies Last reply
    0
    • xeno@hexokina.seX xeno@hexokina.se

      @whitequark@social.treehouse.systems it’s used for loads of things, as a carrier gas, for cooling, and the main way to find leaks in an ultra high vacuum system (of which fabs have loads) is by spraying helium around the outside and looking for helium that makes it inside

      there’s probably plenty of other uses I’m just ignorant of

      whitequark@social.treehouse.systemsW This user is from outside of this forum
      whitequark@social.treehouse.systemsW This user is from outside of this forum
      whitequark@social.treehouse.systems
      wrote last edited by
      #29

      @xeno do you work in the industry?

      xeno@hexokina.seX 2 Replies Last reply
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      • xeno@hexokina.seX xeno@hexokina.se

        @whitequark@social.treehouse.systems it’s used for loads of things, as a carrier gas, for cooling, and the main way to find leaks in an ultra high vacuum system (of which fabs have loads) is by spraying helium around the outside and looking for helium that makes it inside

        there’s probably plenty of other uses I’m just ignorant of

        azonenberg@ioc.exchangeA This user is from outside of this forum
        azonenberg@ioc.exchangeA This user is from outside of this forum
        azonenberg@ioc.exchange
        wrote last edited by
        #30

        @xeno @whitequark yeah but leak detection can't be a high volume use compared to actual production work. Like how often do tools develop leaks if you're not actively working on them?

        azonenberg@ioc.exchangeA xeno@hexokina.seX 2 Replies Last reply
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        • whitequark@social.treehouse.systemsW whitequark@social.treehouse.systems

          @xeno do you work in the industry?

          xeno@hexokina.seX This user is from outside of this forum
          xeno@hexokina.seX This user is from outside of this forum
          xeno@hexokina.se
          wrote last edited by
          #31

          @whitequark@social.treehouse.systems oh nope sorry I didn’t parse “semiconductor folks” as people in the industry

          I have been doing smal-scale semiconductor research work and I’ve learned from some actual semiconductor people but I am def not one of them

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          • azonenberg@ioc.exchangeA azonenberg@ioc.exchange

            @xeno @whitequark yeah but leak detection can't be a high volume use compared to actual production work. Like how often do tools develop leaks if you're not actively working on them?

            azonenberg@ioc.exchangeA This user is from outside of this forum
            azonenberg@ioc.exchangeA This user is from outside of this forum
            azonenberg@ioc.exchange
            wrote last edited by
            #32

            @xeno @whitequark i would expect most leaks to be after maintenance outages then the tool runs leak free for a comparatively long time

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            • whitequark@social.treehouse.systemsW whitequark@social.treehouse.systems

              @xeno do you work in the industry?

              xeno@hexokina.seX This user is from outside of this forum
              xeno@hexokina.seX This user is from outside of this forum
              xeno@hexokina.se
              wrote last edited by
              #33

              @whitequark@social.treehouse.systems oh nope sorry I didn’t parse “semiconductor folks” as people in the industry

              I have been doing small-scale semiconductor research work and I’ve learned from some actual semiconductor people but I am def not one of them

              whitequark@social.treehouse.systemsW 1 Reply Last reply
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              • xeno@hexokina.seX xeno@hexokina.se

                @whitequark@social.treehouse.systems oh nope sorry I didn’t parse “semiconductor folks” as people in the industry

                I have been doing small-scale semiconductor research work and I’ve learned from some actual semiconductor people but I am def not one of them

                whitequark@social.treehouse.systemsW This user is from outside of this forum
                whitequark@social.treehouse.systemsW This user is from outside of this forum
                whitequark@social.treehouse.systems
                wrote last edited by
                #34

                @xeno oh no research definitely counts

                do you know how much helium is used as a carrier gas? cooling in ESC/BSG systems seems to be "few sccm" which is not a geopolitically relevant amount, neither is leak checking

                xeno@hexokina.seX 1 Reply Last reply
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                • azonenberg@ioc.exchangeA azonenberg@ioc.exchange

                  @xeno @whitequark yeah but leak detection can't be a high volume use compared to actual production work. Like how often do tools develop leaks if you're not actively working on them?

                  xeno@hexokina.seX This user is from outside of this forum
                  xeno@hexokina.seX This user is from outside of this forum
                  xeno@hexokina.se
                  wrote last edited by
                  #35

                  @whitequark@social.treehouse.systems @azonenberg@ioc.exchange that’s true,

                  I know people in other labs with UHV stuff who have had to install He recycling systems and stuff over the past couple years to deal with the shortage but they might have some niche use for lots of He they never told me about, I was just thinking of “things that use He”

                  1 Reply Last reply
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                  • whitequark@social.treehouse.systemsW whitequark@social.treehouse.systems

                    semiconductor folks! I've seen a lot of talking heads repeat the claim that "a helium shortage is bad for chip production", never substantiated with useful information. do any of you know:

                    • what is helium actually used in the processes?
                    • which specific processes would be affected?
                    • how much helium (ballpark) is needed per year?
                    • where, if anywhere, a closed cycle is used?
                    • what happened to the strategic helium reserve in the US?
                    psistarpsiii@tacobelllabs.netP This user is from outside of this forum
                    psistarpsiii@tacobelllabs.netP This user is from outside of this forum
                    psistarpsiii@tacobelllabs.net
                    wrote last edited by
                    #36

                    @whitequark I think it may be used in some plasma etch processes. Dry etching is basically sorcery

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                    • whitequark@social.treehouse.systemsW whitequark@social.treehouse.systems

                      @xeno oh no research definitely counts

                      do you know how much helium is used as a carrier gas? cooling in ESC/BSG systems seems to be "few sccm" which is not a geopolitically relevant amount, neither is leak checking

                      xeno@hexokina.seX This user is from outside of this forum
                      xeno@hexokina.seX This user is from outside of this forum
                      xeno@hexokina.se
                      wrote last edited by
                      #37

                      @whitequark@social.treehouse.systems I think it varies a lot, I can look up our uni’s rie system that uses He bsg

                      the other thing with bsg systems is some of them don’t necessarily
                      need He, it’s just optimal given thermal conductivity and inertness. Most bsg systems I know about can also use Ar or N2, but the thermal conductivity probably precludes their use in intense ion milling and stuff.

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